The system includes an integrated JEOL EDS system, which permits combined EDS/WDS analyses with little operational effort. The EDS system acts as kind of an additional WDS spectrometer and includes an input aperture system to optimize the EDS system for the high beam currents and the associated high count rates that are typical in WDS analytics. As an option, a LN2-free EDS detector (SDD) is available as well.
The electron optics of the JXA-8230, which is the fifth generation of the Superprobes, has been optimized for analysis and offers versatile automatic functions (auto focus, control of contrast and brightness, astigmatism correction). A significantly expanded depth of focus can be adjusted very easily through a unique LDF (large depth of focus) and MDF (maximum depth of focus) mode.
Thông số kỹ thuật
Electron optics |
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Electron source
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W- or LaB6 emitter (option)
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Acceleration voltage
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0.2 to 30 kV
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Specimen current
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10-12 to 10-5 A
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Beam current stability
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±0.05% / h, ±0.3% / 12h
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Resolution in SE image
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6 nm
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Magnification
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x40 to x300,000
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>>> Giá bán JXA-8530F