Easy-to-use graphical software interface includes full integration of image observation and element analysis, allowing even novice users to perform any task with high efficiency.
Large specimen stage to accommodate various sample sizes. Fastest chamber pumping times and an additional air-lock system* result in a perfect transfer solution even for the most sensitive of samples.
New high-brightness field emission electron gun and optical system, providing high resolution imaging and high spatial resolution analysis.
Fully integrated and automated low vacuum system.
Streamlined and intuitive operation is enabled by touch panel functionality. Improved automation and recipe functions allow fastest results and maximum through-put, in multi-user laboratories.
Small footprint and modest room installation requirements similar to conventional general-purpose SEMs.
Thông số kỹ thuật
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Accelarating voltage
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0,5 kV - 30 kV
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Resolution (HV)
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1,5 nm (30kV), 4,0 nm (1kV)
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Resolution (LV)
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1,8 nm (15kV, BED)
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Low vacuum
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Bis 150Pa
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Magnification
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5x to 600.000x
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Large analytical chamber
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340mm Durchmesser
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