molbloc/molbox specifications - General
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molbox1+ |
molbox RFM
All specifications same molbox1 unless specified otherwise. |
| Normal Operating Temperature Range: |
15 to 35 °C |
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| Storage Temperature Range: |
-25 to 35 °C |
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| Normal Operating Pressure Range: |
20 to 200 kPa absolute (3 to 30 psia) or 50 to 500 kPa absolute (7 to 70 psia) upstream, or 200 to 2000 kPa (30 to 300 psia) with molbox1+S only. |
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| Overall Flow Range: |
<1 to 5 000 slm |
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Inlet Connection:
1E1-S thru 1E2-S
2E2-S thru 2E3-S
5E3-S and 1E4-S |
1/4 in. VCR™
1/2 in. VCR™
1 in. VCR™ or 1 in. NPT |
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Outlet Connection:
5E1-S thru 2E3-S
5E3-S, 1E4-S |
16 mm (3/4 in.) ISO-KF style vacuum flange
40 mm (1 1/2 in.) ISO-KF style vacuum flange |
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| Gases Supported: |
Nitrogen (N2), Dry Air, Humid Air, Argon (Ar), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Butane (C4H10), Octafluorocyclobutane (C4F8), Xenon (Xe) |
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