Feature:
A heat resistant high-performance filter and our unique cooling unit are installed to enable high-temperature baking.
This type of ovens is optimal for semiconductor wafer and glass substrate baking, aging and other heat treatments requiring high accuracies.
Inert gases can be introduced into the chambers to use the ovens as inert gas ovens.
The chamber interior can keep class 100 (ISO: Class 5) cleanliness when the temperature is stable.
There are 2 hot-air blow types, front side blow horizontal circulation (type V) and side blow (type III). Both achieve high thermal efficiencies and good temperature uniformity.
| CLH series specifications |
| Cleanness |
CLASS 100 (ISO: CLASS 5)
(temperature stable time) |
| Oxygen concentration (Reference) |
Less than 20ppm |
| Control System |
Programmed controller |
Shelf plate withstand
(Uniformly-distributed load) |
15kg/shelf |
| Chamber pressure meter |
0~2kPa |
| Filter pressure meter |
0~1kPa |
| Thermocouple |
K |
| Exhaust port |
1B · ball value |
| Safety feature |
Electric leak breaker,
heat protection, motor over-load protection,
control circuit breaker, cooling water flow meter |
| Standard accessory |
shelves (with shelf plates) |
| Type |
CLH-21CD(III) |
CLH-21CDH(III) |
CLH-21CD(V) |
| Method |
Convection (Side-flow) |
Convection rear to front |
| Max. operation Temperature(*1) |
450°C |
530°C |
500°C |
| Normal operation Temperature(*1) |
RT+70~450°C |
RT+70~530°C |
RT+70~500°C |
| Temperature distribution (Reference)(*2) |
±5°C(at 450°C) |
±8°C(at 530°C) |
±5°C(at 500°C) |
| Heat up time (Reference)(*1) |
Within 80 minutes (RT+70~450°C) |
Within 90 minutes (RT+70~530°C) |
Within 80 minutes (RT+70~500°C) |
| Cool down time (Reference) |
Within 90 minutes (450~100°C) |
Within 100 minutes (530~100°C) |
Within 90 minutes (500~100°C) |
| Filter |
Heat-resistant HEPA filter |
| Oxygen concentration (Reference) |
Within 45 minutes (N2·250L/min introduce) |
| Heater power |
33.6kW(at 200V) |
21kW(at 200V) |
| Temperature recorder |
1 pen temperature recorder (control point · Thermocouple K) |
| Outer dimension (mm) |
1285(W)×2020(H)×1605(D) |
1180(W)×2110(H)×1670(D) |
| Inside dimension (mm) |
670(W)×700(H)×500(D) |
700(W)×700(H)×500(D)
(*3) |
| Equipment weight |
approx. 1050kg |
approx. 1100kg |
| Breaker capacity |
AC 200V 150A
3ø 50/60Hz |
AC 200V 75A
3ø 50/60Hz |