CLO series specifications |
Method |
Convection (Side-flow) |
Max. operation Temperature(*1) |
200°C/350°C(H type) |
Normal operation Temperature(*1) |
RT+60~200°C/RT+60~350°C(H type) |
Temperature distribution (Reference)(*2) |
±4°C(at 200°C)/±8°C(at 350°C)(H type) |
Heat up time (Reference)(*1) |
Within 60 minutes (RT+60~200°C)/Within 120 minutes (RT+60~350°C)(H type) |
Cleanness |
CLASS 100 (ISO: CLASS 5)
(temperature stable time) |
Filter |
Heat-resistant HEPA filter(H type) |
Oxygen concentration (Reference) |
Less than 100ppm (N2 introduce) |
Control System |
Temperature Controller |
Thermocouple |
K |
Safety feature |
Over-heat Protection,
cooling water flow meter (H type),
heat protection, motor over-load protection,
Circuit Breaker |
Standard accessory |
2 shelves (with shelf plates) |
(*1) Temperature at the control point within the heating chamber.
(*2) Valid dimension is two-thirds inside dimension.
☆ Cooling water is necessary to protect seal packing for H-type.
☆ Thermocouples are consumable items. |