The wafer transfer equipment is an automatic machine for transferring wafers back and forth from carrier to carrier or between carriers and boards.
It can handle face to face transfer or back to back transfer.
Minimum contact between wafer and chuck to prevent stress and contamination of wafers.
Motor-driven to prevent the generation of particles.
Unique wafer chuck mechanism reduces shaking during the transport of wafers, allowing careful transfer into quartz boats for the precise and safe transfer of even heavy loads such as compound wafers.
Carrier to carrier transferor
Turn-over (face to face) transferor
Handling-carrier to line-carrier transferor
Automated orientation flat adjuster
Automatic wafer counter
Special specifications available