*Most accurate mass flow meter available
*Insensitive to fluid type
*Variety of enclosure options - up to NEMA 4X/IP66
*High pressure capability for demanding research applications
KEY APPLICATIONS
*Catalyst research
*Liquid precursor delivery to Vaporizers
*Precision coating
*High accuracy filling stations
*Metering pump feedback/control loop
Thông số kỹ thuật
Differentiator: Large installed base with proven long term performance
Flow Range (Full Scale Capacity): .06 sccm - 30,000 sccm
Accuracy
*Standard Flow Accuracy (below) or [(zero stability/flow rate) x 100]% of rate, whichever is greater
*Liquid: 0.2% of rate
*Gas: 0.5% of rate
Response Time
SS Controller: <2 sec
*SS Meter: <0.5 sec
*Alloy C-22 Controller: <12 sec
*Alloy C-22 Meter: <0.5 sec
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