*High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He)
*Wide flow range (0.003 – 100 slpm)
*High-purity VAR 316L Stainless Steel
*Particulate-free
*Helium leak check ports
*Normally closed valve (normally open valve optional)
*Electrically-activated valve override
*Low command flow cutoff
*TTL compatible “valve off” function
Thông số kỹ thuật
Xem thêm: High Temperature Thermal 9861 Series Brooks Instruments