*Long-term zero stability of <±0.5% full scale per year
*Ultra-fast settling times: <300 ms - <400 ms
*Full-scale flow rates: 3 sccm to 5 slm
*Ultra-high purity flow path - 4µ inch Ra surface finish
*Embedded real-time flow error detection and trending using Rate of *Decay (ROD) techniques
*Enhanced process gas accuracy - up to three times improvement - through advanced gas modeling optimized through actual gas testing
*Third generation pressure transient insensitivity (PTI) technology
*High visibility, electronically rotatable LCD display provides local indication of flow, temperature, pressure and network address
*DeviceNet™, RS-485 and analog interfaces
Thông số kỹ thuật
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Differentiator
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*Real-Time Flow Error Detection
*Advanced Diagnostics
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Performance
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Flow Range (Full Scale Capacity)
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*3 sccm - 5 slm (N2 Eq.)
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Accuracy
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*±1% S.P. 10-100% F.S.
*±1% S.P. plus ±0.04% F.S. 2-10% F.S.
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Repeatability
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*< ±0.15% S.P.
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Response Time
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*<300 ms (<860 sccm N2 equivalent)
*<400 ms (861-5000 sccm N2 equivalent)
(to within ±2% FS)
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Ratings
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Max Pressure
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*100 psia max
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Max Temperature
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*50oC
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Electrical
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Analog Communication
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*DeviceNet™
*RS485
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Electrical Connection
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*Analog/RS485 via 9-Pin "D" connector
*DeviceNet™ via 5-Pin "M12" connector
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Power Supply / Consumption
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*Analog/RS485: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
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Compliance
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EMC
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*EC Directive 2004/108/EC
*CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
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Environmental Compliance
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*RoHS Directive (2011/65/2006)
*REACH Directive EC 1907/2006
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Metal Sealed Thermal GF125 Series Brooks Instruments