*Flow response time (settling time) <0.75 seconds
*Innovative MEMS sensor and proprietary PID algorithm
*Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
*Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
*Digital capability via RS-232
Thông số kỹ thuật
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Differentiator
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*Ultra-fast Response Times
*Optional Local Operator Interface
*Compact Size
*Suitable for Non-corrosive Gases
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Performance
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Flow Range (Full Scale Capacity)
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*50 sccm - 40 slpm
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Gases Supported
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Accuracy
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*3.0% of FS
*1.0% of FS (optional)
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Repeatability
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*0.15% FS
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Response Time
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*Normally Closed Valve: 300 ms - <1 sec
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Control Range
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*2-100%
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Optional Equipment
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Display Area
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*28mm wide x 11mm high
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Max Temperature
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*50°C
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Humidity
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*5 - 95% RH (ambient)
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Electrical Connection
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*Two 15-pin D-sub connectors
*One for connection to the 4800 Series
*One for the remote connection
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Compliance
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EMC
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*EMC Directive 2004/108/EC: per EN 61326:2006
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Certifications/Approvals
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*ATEX Zone 2
*CSA Div 2/Zone 2 (Recognized)
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Elastomer Sealed Thermal 5700 Series Brooks Instruments