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Elastomer Sealed Thermal GF40 Brooks Instruments

Mã sản phẩm: GF40
Sử dụng cho Model:
Hãng SX: Brooks Instruments
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Elastomer Sealed Thermal
Model: GF40
Hãng: Brooks Instruments

Liên Hệ Hỗ Trợ

    • SĐT: 0984 843 683

    • Mail: info@ttech.vn

      • Zalo: 0984.843.683

Thông tin sản phẩm

*Programmable multi-gas/multi-range capabilities
*Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
*Sub-1 second flow response time and accuracy of 1% set point for demanding applications
*Well suited for a variety of gases
*Fast response, Hastelloy sensor
*Easily accessible diagnostic service port is independent of tool communication
*Multi-protocol communication options include *DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface


Thông số kỹ thuật


Differentiator

*High Accuracy

*MultiFlo™ Capability

*Compact Size

*Suitable for Full Suite of Gases

Performance

Flow Range (Full Scale Capacity)

*3 sccm - 50 slpm

Accuracy

 

*1% of SP 35-100%, 0.35% of FS 2-35%

Repeatability

*0.20% SP

Linearity

*±0.5% FS (included in accuracy)

Response Time

 

*Normally Closed Valve: 300 ms - <1 sec

Multi-Gas & Range Configurability

 

*MultiFlo™ Available

Number of Bins

*10 Bins

Control Range

 

*2-100%

Zero Stability

 

*<±0.5% FS per year

Flow Temperature Coefficient

 

*Zero: <0.05% of F.S per oC

*Span: <0.1% of S.P. per oC

Pressure Coefficient

 

*0.03% per psi (0-50psi N2)

Attitude Sensitivity

 

*<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

Ratings

Temperature Range

 

*5-50oC (41-122oF)

Differential Pressure Range

Controllers

 

 

* 3-860 sccm = 7-45 psid

*861-7200 sccm = 15-45 psid

*7201-55000 sccm = 25-45 psid

- Contact Brooks Technical Support for more information.

Leak Integrity

1x10^-9 atm cc/sec He

Mechanical

Seal Material

* Elastomer Seal

Wetted Materials

 

*316 Stainless Steel, Hastelloy C-22, 1707 PH,43055

Valve Options

 

*Normally Closed

*Normally Open

*Meter (no valve)

Diagnostics

Diagnostic / Service Port

 

*Available




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