*Long-term zero stability of <±0.5% full scale per year
*<1 second settling times
*Full-scale flow rates up to 300 slpm
*All-metal seal flow path - 16µ inch Ra surface finish
*Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
*Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
*Best-in-class temperature coefficient specification through active temperature compensation
*Embedded self-test routines and independent diagnostic/service port
*Slimline body with VCR fittings
Thông số kỹ thuật
Differentiator: High Purity
Performance
Flow Range (Full Scale Capacity): 3 sccm - 300 slm
Accuracy
*±1% S.P. 35-100%
*±0.35% F.S. < 5-35%
Repeatability: < ±0.2% S.P.
Linearity: ±0.5% F.S. (included in accuracy)
Control Range: < 5% - 100%
Number of Bins
*Standard GF Series: 11 bins
*High Flow GF Series: 4 bins
Valve Shut Down
*Standard GF Series: < 1% F.S.
*High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.
Mechanical
Level of Purity / Surface Finish: 16µ inch Ra
Wetted Materials
*316 Stainless Steel
*Hastelloy C-22
*17-7 PH
*430SS
*KM-45
Ratings
Differential Pressure Range
*3-860 sccm = 7-45 psid
*861-7200 sccm = 15-45 psid
*7201-50000 sccm = 25-45 psid
*51-300 slm = 30-90 psid
(typical pressure drops)
Diagnostics & Display
Diagnostic / Service Port
*RS485 via 2.5mm jack (all models)
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