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Metal Sealed Thermal GF125 Series Brooks Instruments

Mã sản phẩm: GF125 Series
Sử dụng cho Model:
Hãng SX: Brooks Instruments
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Tình trạng

Tình trạng: Còn hàng

Đặt hàng
Metal Sealed Thermal
Model: GF125 Series
Hãng: Brooks Instruments



Liên Hệ Hỗ Trợ

    • SĐT: 0984 843 683

    • Mail: info@ttech.vn

      • Zalo: 0984.843.683

Thông tin sản phẩm

*Long-term zero stability of <±0.5% full scale per year
*Ultra-fast settling times: 300 ms - <700 ms
*Full-scale flow rates up to 300 slpm
*Ultra-high purity flow path - 4µ inch Ra surface finish
*SEMI F20 compliant wetted materials
*Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
*Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
*MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
*Local display indicates flow, temperature, pressure and


Thông số kỹ thuật


Differentiator

 

*Ultra-High Purity

*Ultra-Fast Response Time

*Pressure Transient Insensitivity

Performance

Flow Range (Full Scale Capacity)

 

*3 sccm - 300 slm

Accuracy

 

*±1% S.P. > 35-100%

*±0.35% F. S. 2-35%

Repeatability

 

*< ±0.15% S.P.

Response Time

 

*300ms - < 1 sec

Ratings

Max Pressure

 

*Standard GF Series: 100 psia max

*High Flow GF Series: 75 psig (controller), 150 psig (meter)

Max Temperature

 

*0-5 Vdc

Electrical

Analog Communication

 

*DeviceNet™

*RS485

Electrical Connection

 

*Analog/RS485 via 9-Pin "D" connector

*DeviceNet™ via 5-Pin "M12" connector

*Various cable adaptors available. See product data sheet for more information.



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